Error separation methods based on absolute testing of non-uniform sampling

doi:10.1016/j.ijleo.2018.08.017

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Error separation methods based on absolute testing of non-uniform sampling
	L.Zhang; Y.Xiang
刊名	Optik
	2019
卷号	178 页码:986-991
关键词	Absolute calibration,Grating lateral shearing interferometer,Systemerrors,Rotation algorithm,interferometer,metrology,Optics
ISSN号	0030-4026
DOI	10.1016/j.ijleo.2018.08.017
英文摘要	Grating lateral shearing interferometry is one of important technique to test the system wavefront aberration from lithographic lens. In order to achieve the calibration in ultra-high-precision, we must eliminate the system errors from the grating lateral shearing interferometer. Therefore, a three-step average algorithm and a weighed-three-step average algorithm are proposed to remove the rotationally asymmetric system errors from our shearing setup. The research results show that the RMS of the accuracy of three-step average algorithm centered on 45 degrees can approach 0.71 nm, and the RMS of the accuracy of its weighed algorithm can approach 0.54 nm.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/62801]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.Zhang,Y.Xiang. Error separation methods based on absolute testing of non-uniform sampling[J]. Optik,2019,178:986-991.
APA	L.Zhang,&Y.Xiang.(2019).Error separation methods based on absolute testing of non-uniform sampling.Optik,178,986-991.
MLA	L.Zhang,et al."Error separation methods based on absolute testing of non-uniform sampling".Optik 178(2019):986-991.