Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies | |
Zhang, Y.; Tian, X. B.; Liang, R. G. | |
刊名 | Optics Express
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2018 | |
卷号 | 26期号:12页码:15059-15072 |
关键词 | wave-front reconstruction testing optical-surfaces iterative algorithm extraction interferograms vibration errors steps Optics |
ISSN号 | 1094-4087 |
DOI | 10.1364/oe.26.015059 |
英文摘要 | To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. |
内容类型 | 期刊论文 |
源URL | [http://ir.ciomp.ac.cn/handle/181722/61117] ![]() |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | Zhang, Y.,Tian, X. B.,Liang, R. G.. Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies[J]. Optics Express,2018,26(12):15059-15072. |
APA | Zhang, Y.,Tian, X. B.,&Liang, R. G..(2018).Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies.Optics Express,26(12),15059-15072. |
MLA | Zhang, Y.,et al."Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies".Optics Express 26.12(2018):15059-15072. |
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