Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition

doi:10.1364/ao.57.000f31

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition
	Zhang, Z. Y.; Wang, R. Q.; Hao, T.; Guo, C. L.; Xue, D. L.; Zhang, X. J.
刊名	Applied Optics
	2018
卷号	57 期号:34 页码:F31-F36
关键词	Optics
ISSN号	1559-128X
DOI	10.1364/ao.57.000f31
英文摘要	With the development of optical systems used in astronomical and earth observation, aspherical and free-form surfaces are increasingly used because they are lightweight and have improved image quality. As a highly accurate, aberrationless technique, computer-generated hologram (CGH) plays an important role in wavefront testing. At present, the main way to fabricate phase CGH is reactive ion etching, which suffers from low accuracy. To improve the accuracy, physical vapor deposition (PVD) is applied in the fabrication of phase CGH. The wavefront errors of PVD-fabricated phase CGH were analyzed. Testing results indicate that the wavefront error of the CGH is 0.020 lambda root mean square (RMS), mainly caused by the machine tool orthogonality error rather than the PVD process. The diffraction efficiency of the +1st order is 22.4%. (C) 2018 Optical Society of America
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/60990]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Z. Y.,Wang, R. Q.,Hao, T.,et al. Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition[J]. Applied Optics,2018,57(34):F31-F36.
APA	Zhang, Z. Y.,Wang, R. Q.,Hao, T.,Guo, C. L.,Xue, D. L.,&Zhang, X. J..(2018).Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition.Applied Optics,57(34),F31-F36.
MLA	Zhang, Z. Y.,et al."Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition".Applied Optics 57.34(2018):F31-F36.