Trajectory-fitting and testing error analysis of stage for curved grating etching

doi:10.3788/OPE.20182603.0588

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Trajectory-fitting and testing error analysis of stage for curved grating etching
	Shen, Chen; Tan, Xin; Zhu, Ji-Wei; Zhang, Wei; Qi, Xiang-Dong
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2018
卷号	26 期号:3 页码:588-596
关键词	Curve fitting Diffraction gratings Errors Etching
ISSN号	1004924X
DOI	10.3788/OPE.20182603.0588
英文摘要	To manufacture curved surface gratings with highly consistent blazing angles, the curve-fitting motion of the three-dimensional (3D) stage is essential. Therefore, an investigation of the 3D stage was performed based on a control algorithm for the curved blazed grating etching system. First, a concept of the 3D stage of the curved blazed grating etching system was introduced. Subsequently, according to the actual requirement of the etching machine, the theoretical calculating method for the track of the stage was provided. Then, the arc-fitting algorithm of the stage was proposed and the curve-fitting motion of the stage was performed. Finally, the actual motion tracks of the 3D stage were measured and compared with ideal tracks. Experimental results demonstrate that the cumulative positioning error of the linear fitting motion of the stage after 15 cycles is less than 0.218 mm, and the slope angle error is less than 0.02; the cumulative positioning error of the curve fitting motion of the stage after 40 cycles is less than 0.2 mm and the rotating angle error is in the range of -0.2-0.1. This method has realized the function of scanning etching and oscillating etching of the 3D stage. The stability, accuracy, and interference rejection of the stage satisfy the processing requirements. 2018, Science Press. All right reserved.
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/60844]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Shen, Chen,Tan, Xin,Zhu, Ji-Wei,et al. Trajectory-fitting and testing error analysis of stage for curved grating etching[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2018,26(3):588-596.
APA	Shen, Chen,Tan, Xin,Zhu, Ji-Wei,Zhang, Wei,&Qi, Xiang-Dong.(2018).Trajectory-fitting and testing error analysis of stage for curved grating etching.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,26(3),588-596.
MLA	Shen, Chen,et al."Trajectory-fitting and testing error analysis of stage for curved grating etching".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 26.3(2018):588-596.