Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk

doi:10.3788/CJL201845.0504002

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk
	Fang, Chao; Xiang, Yang; Qi, Keqi
刊名	Zhongguo Jiguang/Chinese Journal of Lasers
	2018
卷号	45 期号:5
关键词	Aberrations Crosstalk Interferometry Measurement Photolithography Shearing Wave interference Wavefronts
ISSN号	2587025
DOI	10.3788/CJL201845.0504002
英文摘要	In order to reduce the difficulties in manufacture and assembly of the spatial filter with two square windows in image plane, we propose a grating lateral shearing interferometry based on a nine step phase shifting method, which is used to calibrate the zero-order phase error. The zero-order crosstalk could be eliminated only by a variable space filter. The parameters are designed and the principle verification system is completed for a projection lithography lens with numerical aperture of 0.125. Then the wavefront aberration measurement of this lens is achieved by the restoration of shearing phase and the reconstruction of wavefront. The results show that the wavefront aberration is less than 20.32 nm. The repeatability precision of the grating lateral shearing interferometer is measured. The root-mean-square value of the repeatability precision is 0.1303 nm, which shows the performance of this system is well. 2018, Chinese Lasers Press. All right reserved.
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/60677]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Fang, Chao,Xiang, Yang,Qi, Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(5).
APA	Fang, Chao,Xiang, Yang,&Qi, Keqi.(2018).Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk.Zhongguo Jiguang/Chinese Journal of Lasers,45(5).
MLA	Fang, Chao,et al."Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk".Zhongguo Jiguang/Chinese Journal of Lasers 45.5(2018).