A probabilistic approach for on-line positioning in nano manipulations

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	A probabilistic approach for on-line positioning in nano manipulations
	Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Wang YC(王越超); Dong ZL(董再励); Wang ZY(王智宇)
	2010
会议日期	July 7- 9, 2010
会议地点	Jinan, China
关键词	Atomic Force Microscopy Experiments Intelligent Control Kalman Filters Micromanipulators Nanotechnology Probability Distributions Uncertainty Analysis
页码	450-455
英文摘要	Nanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal drift through the general measure. In this paper, a probabilistic approach incorporating a Kalman filter based localization algorithm is introduced into the on-line estimation of the tip position expressed by probability distribution known as probability density function. A probabilistic motion model of AFM tip is introduced that consists of a PZT dynamic model based on the Prandtl-Ishlinskii (PI) model, and motion error distribution obtained from calibration experiments. An observation model by using a local scanning algorithm is proposed and the change of uncertainty distribution on scanning landmarks, e.g. nano-particles, near the target position is analyzed. Some experiment results are included for showing the motion error distribution and a simulation result is presented to illustrate the validity of the proposed method.
产权排序	1
会议录	Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
会议录出版者	IEEE
会议录出版地	Piscataway, NJ
语种	英语
ISBN号	978-1-4244-6712-9
WOS记录号	WOS:000295959500083
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8512]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Yuan S(袁帅)
作者单位	1.Dept. of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China 3.Graduate University, Chinese Academy of Sciences, Beijing, 100039, China 4.Dept. of Electrical and Computer Engineering, Michigan State University, United States
推荐引用方式 GB/T 7714	Yuan S,Liu LQ,Wang ZD,et al. A probabilistic approach for on-line positioning in nano manipulations[C]. 见:. Jinan, China. July 7- 9, 2010.