Variable optical attenuators based on SOI with a 3 μm top silicon layer

	Variable optical attenuators based on SOI with a 3 μm top silicon layer
	Pei Yuan; Yue Wang; Yuanda Wu; Junming An
刊名	Applied optics
	2019
卷号	58 期号:17 页码:4630-4636
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29731]
专题	半导体研究所_光电子研究发展中心
推荐引用方式 GB/T 7714	Pei Yuan;Yue Wang;Yuanda Wu;Junming An. Variable optical attenuators based on SOI with a 3 μm top silicon layer[J]. Applied optics,2019,58(17):4630-4636.
APA	Pei Yuan;Yue Wang;Yuanda Wu;Junming An.(2019).Variable optical attenuators based on SOI with a 3 μm top silicon layer.Applied optics,58(17),4630-4636.
MLA	Pei Yuan;Yue Wang;Yuanda Wu;Junming An."Variable optical attenuators based on SOI with a 3 μm top silicon layer".Applied optics 58.17(2019):4630-4636.