TID Response and Radiation-Enhanced Hot-Carrier Degradation in 65-nm nMOSFETs: Concerns on the Layout-Dependent Effects
Ren, ZX (Ren, Zhexuan); 1An, X (An, Xia) 1; Li, GS (Li, Gensong) 1; Liu, JY (Liu, Jingyi) 1; Xun, MZ (Xun, Mingzhu) 2; Guo, Q (Guo, Qi) 2; Zhang, X (Zhang, Xing) 1; Huang, R (Huang, Ru) 1
刊名IEEE TRANSACTIONS ON NUCLEAR SCIENCE
2021
卷号68期号:8页码:1565-1570
关键词65 nmhot-carrier injection (HCI)layout-dependent effect (LDE)nMOSstressthreshold voltagetotal ionizing dose (TID)
ISSN号0018-9499
DOI10.1109/TNS.2021.3063137
英文摘要

Layout dependence of total-ionizing-dose (TID) response, hot-carrier degradation (HCD), and radiation-enhanced HCD (REHCD) in 65-nm bulk Si nMOSFETs are experimentally investigated in this article. For TID response, the average irradiation-induced Vth shift slightly increases by several millivolts with increasing gateto-active area spacing (SA), which is contrary to the trend previously observed in pMOSFETs. HCD is much more severe in irradiated devices and the average hot-carrier-stress-induced Vth shift continuously decrease with increasing SA for both irradiated and unirradiated devices, indicating potential better hot-carrier reliability with larger SA. Finally, layout dependence of REHCD is illustrated. REHCD is enhanced with increasing SA, which may reduce the reliability improvement of irradiated devices with larger SA. These layout dependencies are attributed to larger tensile strain in the channel. The results provide early insights into the layout dependence of TID effects and HCD, highlighting potential concerns on the reliability of devices working in radiation environment.

WOS记录号WOS:000687247300007
内容类型期刊论文
源URL[http://ir.xjipc.cas.cn/handle/365002/7945]  
专题固体辐射物理研究室
作者单位1.Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Urumqi 830011, Peoples R China
2.Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
推荐引用方式
GB/T 7714
Ren, ZX ,1An, X ,Li, GS ,et al. TID Response and Radiation-Enhanced Hot-Carrier Degradation in 65-nm nMOSFETs: Concerns on the Layout-Dependent Effects[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE,2021,68(8):1565-1570.
APA Ren, ZX .,1An, X .,Li, GS .,Liu, JY .,Xun, MZ .,...&Huang, R .(2021).TID Response and Radiation-Enhanced Hot-Carrier Degradation in 65-nm nMOSFETs: Concerns on the Layout-Dependent Effects.IEEE TRANSACTIONS ON NUCLEAR SCIENCE,68(8),1565-1570.
MLA Ren, ZX ,et al."TID Response and Radiation-Enhanced Hot-Carrier Degradation in 65-nm nMOSFETs: Concerns on the Layout-Dependent Effects".IEEE TRANSACTIONS ON NUCLEAR SCIENCE 68.8(2021):1565-1570.
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