Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source

doi:10.1063/1.5128393

	Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source
	Liu, Y. G.1,2; Liu, J. L.1; Wu, Q.1,2; Sun, L. T.1,2
刊名	REVIEW OF SCIENTIFIC INSTRUMENTS
	2020-02-01
卷号	91 期号:2 页码:4
ISSN号	0034-6748
DOI	10.1063/1.5128393
通讯作者	Sun, L. T.(sunlt@impcas.ac.cn)
英文摘要	A very compact permanent magnet 2.45 GHz electron cyclotron resonance ion source has been designed and developed for various purposes. The microwave power is coupled into the plasma chamber using the coaxial antenna instead of the waveguide, the magnetic field is produced by two NdFeB permanent magnet rings, and the diameter of the source body is only 10 cm. The beam current under different conditions was measured. A maximum of 5.8 mA H+/H-2(+)/H-3(+) mixed beam could be extracted from a 5.5 mm diameter extraction aperture. Published under license by AIP Publishing.
WOS研究方向	Instruments & Instrumentation ; Physics
语种	英语
出版者	AMER INST PHYSICS
WOS记录号	WOS:000519228700001
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/140924]
专题	中国科学院近代物理研究所
通讯作者	Sun, L. T.
作者单位	1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Sch Nucl Sci & Technol, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Liu, Y. G.,Liu, J. L.,Wu, Q.,et al. Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2020,91(2):4.
APA	Liu, Y. G.,Liu, J. L.,Wu, Q.,&Sun, L. T..(2020).Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source.REVIEW OF SCIENTIFIC INSTRUMENTS,91(2),4.
MLA	Liu, Y. G.,et al."Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source".REVIEW OF SCIENTIFIC INSTRUMENTS 91.2(2020):4.