Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy

doi:10.1088/2058-6272/ac446d

	Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy
	Zhang, Wenjin 1,2; Wei, Xinyu 1,2; Chen, Longwei 3; Lin, Qifu 3; Jiang, Yiman 3; Liu, Chengzhou 2,3; Shan, Jiafang 2
刊名	PLASMA SCIENCE & TECHNOLOGY
	2022-02-01
卷号	24
关键词	surface wave plasma low temperature plasma optical emission diagnosis
ISSN号	1009-0630
DOI	10.1088/2058-6272/ac446d
通讯作者	Chen, Longwei(lwchen@ipp.ac.cn)
英文摘要	The coaxial surface wave linear plasma with preeminent axial uniformity is developed with the 2.45 GHz microwave generator. By optical emission spectroscopy, parameters of the argon linear plasma with a length over 600 mm are diagnosed under gas pressure of 30 and 50 Pa and different microwave powers. The spectral lines of argon and H (beta) (486.1 nm) atoms in excited state are observed for estimating electron excitation temperature and electron density. Spectrum bands in 305-310 nm of diatomic OH (A(2)Sigma(+)-X-2 Pi(i)) radicals are used to determine the molecule rotational temperature. Finally, the axial uniformity of electron density and electron excitation temperature are analyzed emphatically under various conditions. The results prove the distinct optimization of compensation from dual powers input, which can narrow the uniform coefficient of electron density and electron excitation temperature by around 40% and 22% respectively. With the microwave power increasing, the axial uniformity of both electron density and electron excitation temperature performs better. Nevertheless, the fluctuation of electron density along the axial direction appeared with higher gas pressure. The axial uniformity of coaxial surface wave linear plasma could be controlled by pressure and power for a better utilization in material processing.
资助项目	National Natural Science Foundation of China[11575252] ; National Natural Science Foundation of China[11775270] ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China[19KZS206] ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China[21KZS201]
WOS关键词	LARGE-AREA ; STARK PROFILES ; PROPAGATION ; DEPENDENCE ; COLUMNS
WOS研究方向	Physics
语种	英语
出版者	IOP Publishing Ltd
WOS记录号	WOS:000745323200001
资助机构	National Natural Science Foundation of China ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/127327]
专题	中国科学院合肥物质科学研究院
通讯作者	Chen, Longwei
作者单位	1.Univ Sci & Technol China, Hefei 230026, Peoples R China 2.Chinese Acad Sci, Inst Plasma Phys, Hefei Inst Phys Sci, Hefei 230031, Peoples R China 3.Hefei Comprehens Natl Sci Ctr, Inst Energy, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Wenjin,Wei, Xinyu,Chen, Longwei,et al. Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy[J]. PLASMA SCIENCE & TECHNOLOGY,2022,24.
APA	Zhang, Wenjin.,Wei, Xinyu.,Chen, Longwei.,Lin, Qifu.,Jiang, Yiman.,...&Shan, Jiafang.(2022).Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy.PLASMA SCIENCE & TECHNOLOGY,24.
MLA	Zhang, Wenjin,et al."Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy".PLASMA SCIENCE & TECHNOLOGY 24(2022).