Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers

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	Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers
	Wei YJ(魏阳杰); Herzog, Thomas; Heuer, Henning
刊名	Sensors & Transducers Journal
	2013
卷号	18 期号:SPEC.ISS.1 页码:66-75
关键词	Electrode size Electrical impedance matching Stacked transducer Ultrasonic transducer.
ISSN号	2306-8515
产权排序	1
中文摘要	This paper presents three methods to improve the performance of a high frequency aluminum nitride (AlN) ultrasonic transducer. For a high frequency AlN ultrasonic transducer, its properties are related with its top electrode size, electrical impedance matching and layers of the piezoelectric plate. However, until now, no research has been published to analyze their influence on the performance of AlN ultrasonic transducers, especially in the frequency range above 200 MHz. First, two factors related with the top electrode size are proposed based on transmission coefficient and stored energy, and analysis is performed on an Al-AlN-Al on silicon wafers with different electrode sizes. The result proves when the electrode size is 1mm2, the transducer can provide the maximum output voltage and the maximal signal- to-noise ratio (SNR). Then, electrical impedance matching is conducted to improve the performance of transducers, and the experiment result shows that after matching, the resolution and sensitivity have been improved. Finally, a stacked AlN transducer is developed and its model is constructed to analyze its properties in time domain and frequency domain. The comparison between the simulation and the experiment shows the effectiveness of the proposed model, and a stacked structure can be used to improve the sensitivity of a high frequency AlN ultrasonic transducer.
收录类别	EI
语种	英语
公开日期	2013-10-05
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/12560]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Wei YJ,Herzog, Thomas,Heuer, Henning. Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers[J]. Sensors & Transducers Journal,2013,18(SPEC.ISS.1):66-75.
APA	Wei YJ,Herzog, Thomas,&Heuer, Henning.(2013).Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers.Sensors & Transducers Journal,18(SPEC.ISS.1),66-75.
MLA	Wei YJ,et al."Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers".Sensors & Transducers Journal 18.SPEC.ISS.1(2013):66-75.