Nanodot deposition and its application with atomic force microscope

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Nanodot deposition and its application with atomic force microscope
	Liu ZL(刘增磊); Jiao ND(焦念东); Xu K(许可); Wang ZD(王志东); Dong ZL(董再励); Liu LQ(刘连庆)
刊名	JOURNAL OF NANOPARTICLE RESEARCH
	2013
卷号	15 期号:6 页码:1-11
关键词	Nanoparticle Welding Nanodot Deposition Nanofabrication Carbon nanotube
ISSN号	1388-0764
通讯作者	刘增磊 ; 焦念东
产权排序	1
中文摘要	Nanodot deposition using atomic force microscope (AFM) is investigated. To realize repeatable and precise deposition of nanodots, the detailed control method is discussed. The electric field between AFM tip and substrate is analyzed, and a convenient method to control tip-substrate separation is proposed. In experiments, two nanodot matrixes are fabricated and the heights of the nanodots are analyzed. Experimental results testify that the control method can lead to repeatable and precise fabrication of deposited nanodots. As an application of deposited nanodots, a carbon nanotube (CNT) is soldered on gold electrodes with deposited Au nanodots. After soldering, the contact resistances between the CNT and the electrodes decrease greatly. AFM-based nanodot deposition can be used to fabricate special nanopatterns; also it can be used to solder nanomaterials on substrates to improve the electrical connection, which has a promising future for nanodevice fabrication.
WOS标题词	Science & Technology ; Physical Sciences ; Technology
类目[WOS]	Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
研究领域[WOS]	Chemistry ; Science & Technology - Other Topics ; Materials Science
关键词[WOS]	SCANNING-TUNNELING-MICROSCOPE ; FIELD EVAPORATION ; TIP ; FABRICATION ; NANOFABRICATION ; NANOSTRUCTURES ; NANOPARTICLES ; MANIPULATION ; NANOWIRES ; EMISSION
收录类别	SCI ; EI
资助信息	National Natural Science Foundation of China [61106109]; Natural Science Foundation of Liaoning Province of China [201102229]
语种	英语
WOS记录号	WOS:000319516400021
公开日期	2013-10-05
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/12556]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Liu ZL,Jiao ND,Xu K,et al. Nanodot deposition and its application with atomic force microscope[J]. JOURNAL OF NANOPARTICLE RESEARCH,2013,15(6):1-11.
APA	Liu ZL,Jiao ND,Xu K,Wang ZD,Dong ZL,&Liu LQ.(2013).Nanodot deposition and its application with atomic force microscope.JOURNAL OF NANOPARTICLE RESEARCH,15(6),1-11.
MLA	Liu ZL,et al."Nanodot deposition and its application with atomic force microscope".JOURNAL OF NANOPARTICLE RESEARCH 15.6(2013):1-11.