Batch production of uniform graphene films via controlling gas-phase dynamics in confined space

doi:10.1088/1361-6528/abcceb

	Batch production of uniform graphene films via controlling gas-phase dynamics in confined space
	Zhang,Yongna 1; Huang,Deping 1; Duan,Yinwu 2; Chen,Hui 1; Tang,Linlong 1; Shi,Mingquan 1; Li,Zhancheng 1; Shi,Haofei 1
刊名	Nanotechnology
	2020-12-18
卷号	32 期号:10
关键词	batch production uniform graphene films gas-phase dynamics confined reaction space
ISSN号	0957-4484
DOI	10.1088/1361-6528/abcceb
通讯作者	Zhang,Yongna()
英文摘要	Abstract Batch production of continuous and uniform graphene films is critical for the application of graphene. Chemical vapor deposition (CVD) has shown great promise for mass producing high-quality graphene films. However, the critical factors affected the uniformity of graphene films during the batch production need to be further studied. Herein, we propose a method for batch production of uniform graphene films by controlling the gaseous carbon source to be uniformly distributed near the substrate surface. By designing the growth space of graphene into a rectangular channel structure, we adjusted the velocity of feedstock gas flow to be uniformly distributed in the channel, which is critical for uniform graphene growth. The monolayer graphene film grown inside the rectangular channel structure shows high uniformity with average sheet resistance of 345 Ω sq?1 without doping. The experimental and simulation results show that the placement of the substrates during batch growth of graphene films will greatly affect the distribution of gas-phase dynamics near the substrate surface and the growth process of graphene. Uniform graphene films with large-scale can be prepared in batches by adjusting the distribution of gas-phase dynamics.
语种	英语
出版者	IOP Publishing
WOS记录号	IOP:0957-4484-32-10-ABCCEB
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/12410]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Zhang,Yongna
作者单位	1.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, People’s Republic of China 2.Chongqing Engineering Research Center of Graphene Film Manufacturing, Chongqing 401329, People’s Republic of China
推荐引用方式 GB/T 7714	Zhang,Yongna,Huang,Deping,Duan,Yinwu,et al. Batch production of uniform graphene films via controlling gas-phase dynamics in confined space[J]. Nanotechnology,2020,32(10).
APA	Zhang,Yongna.,Huang,Deping.,Duan,Yinwu.,Chen,Hui.,Tang,Linlong.,...&Shi,Haofei.(2020).Batch production of uniform graphene films via controlling gas-phase dynamics in confined space.Nanotechnology,32(10).
MLA	Zhang,Yongna,et al."Batch production of uniform graphene films via controlling gas-phase dynamics in confined space".Nanotechnology 32.10(2020).