Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model

doi:10.1016/j.optlaseng.2020.106413

	Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model
	Zhang, Zhirui 1,4; Lu, Yao 1; Lv, Cixing 1; Mao, Qi 3; Wang, Songlong 1,4; Yan, Shihan 2
刊名	OPTICS AND LASERS IN ENGINEERING
	2021-03-01
卷号	138 页码:9
关键词	THz imaging image restoration wavelets denoising PSF deconvolution
ISSN号	0143-8166
DOI	10.1016/j.optlaseng.2020.106413
通讯作者	Lu, Yao(rsluyao@126.com)
英文摘要	In recent years, terahertz (THz) imaging technology has attracted much attention in the detection of the integrated circuit (IC). However, limited by the hardware of the imaging system, THz images often contain a significant amount of noise, which impairs the quality of the image details. The THz image is also degraded due to the long wavelength. In this study, we propose a novel method for THz image restoration. We first apply a wavelet denoising technique to process the THz time-frequency signal. The point spread function (PSF) is then mathematically modeled to restore the details of the IC image, as the degradation of the THz image can be regarded as the convolution process of the object equation and PSF. Finally, we compare the performance between the restored THz images before and after wavelet denoising. The results demonstrate that the restored image after denoising performs better in peak signal-to-noise ratio and visual improvements, proving the practicability and precision of our proposed method.
资助项目	National key research and development program of China[2018YFB1702701] ; National key research and development program of China[2018YFB1004004]
WOS研究方向	Optics
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:000593959700014
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/12393]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Lu, Yao
作者单位	1.Dongguan Univ Technol, Sch Elect Engn & Intelligentizat, Dongguan 523808, Peoples R China 2.Chongqing Inst Green & Intelligent Technol, Chongqing Engn Res Ctr High Resolut & Three Dimen, Chongqing 400714, Peoples R China 3.Dongbei Univ Finance & Econ, Sch Management Sci & Engn, Dalian 116025, Peoples R China 4.Shenzhen Univ, Coll Mechatron & Control Engn, Shenzhen 518060, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Zhirui,Lu, Yao,Lv, Cixing,et al. Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model[J]. OPTICS AND LASERS IN ENGINEERING,2021,138:9.
APA	Zhang, Zhirui,Lu, Yao,Lv, Cixing,Mao, Qi,Wang, Songlong,&Yan, Shihan.(2021).Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model.OPTICS AND LASERS IN ENGINEERING,138,9.
MLA	Zhang, Zhirui,et al."Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model".OPTICS AND LASERS IN ENGINEERING 138(2021):9.