Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique | |
Chen, Yuanfang ; Pei, Weihua ; Tang, Rongyu ; Chen, Sanyuan ; Chen, Hongda | |
刊名 | sensors and actuators a-physical
![]() |
2013 | |
卷号 | 189页码:143-150 |
学科主题 | 光电子学 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-22 |
内容类型 | 期刊论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/24398] ![]() |
专题 | 半导体研究所_集成光电子学国家重点实验室 |
推荐引用方式 GB/T 7714 | Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,et al. Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique[J]. sensors and actuators a-physical,2013,189:143-150. |
APA | Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,Chen, Sanyuan,&Chen, Hongda.(2013).Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique.sensors and actuators a-physical,189,143-150. |
MLA | Chen, Yuanfang,et al."Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique".sensors and actuators a-physical 189(2013):143-150. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论