Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique

	Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique
	Chen, Yuanfang ; Pei, Weihua ; Tang, Rongyu ; Chen, Sanyuan ; Chen, Hongda
刊名	sensors and actuators a-physical
	2013
卷号	189 页码:143-150
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2013-09-22
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/24398]
专题	半导体研究所_集成光电子学国家重点实验室
推荐引用方式 GB/T 7714	Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,et al. Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique[J]. sensors and actuators a-physical,2013,189:143-150.
APA	Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,Chen, Sanyuan,&Chen, Hongda.(2013).Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique.sensors and actuators a-physical,189,143-150.
MLA	Chen, Yuanfang,et al."Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique".sensors and actuators a-physical 189(2013):143-150.