Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition

doi:10.1016/j.apsusc.2019.07.110

CORC > 金属研究所 > 中国科学院金属研究所

	Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition
	Yan, Guangyu 1,2; Wu, Yuhou 1,2; Cristea, Daniel 3; Liu, Lusheng 4; Tierean, Mircea 5; Wang, Yibao 4; Lu, Feng 1; Wang, He 1,2; Yuan, Ziyao 4; Munteanu, Daniel 3
刊名	APPLIED SURFACE SCIENCE
	2019-11-15
卷号	494 页码:401-411
关键词	HFCVD Multi-layer diamond films Adhesion Hardness Young's modulus Wear resistance
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2019.07.110
通讯作者	Wu, Yuhou(wuyh@sjzu.edu.cn) ; Zhao, Dehong(jtjxzdh@sjzu.edu.cn)
英文摘要	Diamond films were deposited on cobalt-cemented tungsten carbide (WC-Co) by Hot-Filament Chemical Vapor Deposition (HFCVD). The mechanical properties and wear behavior of single-layer and multi-layer diamond films were compared, based on the difference of diamond crystal formation and internal structure. Adhesive failure modes and critical loads, post-scratch tests, were identified according to the applied load, acoustic emission and friction force. For single-layer diamond films, the samples produced with lower CH4 concentration evidence columnar crystal diamond structure, which exhibit better adhesive properties. The samples produced with 5% CH4 exhibit the lowest hardness, however, due to their higher crystallinity and nucleation density, they exhibit higher toughness. The multi-layer diamond film with 300 nm alternate thickness per interlayer shows the highest critical delamination load (23.22 N). Concerning the multi-layer diamond films, the hardness and Young's modulus increases from 84.13 to 94.01 GPa and 788.65 to 936.26 GPa, respectively, with the alternate thickness change from 100 nm to 600 nm per layer, which indicates that thicker alternate layers lead to higher hardness and toughness. The wear behavior of the nano-crystalline (NCD) single-layer diamond films is potentially related to the less adequate adhesive abilities to the substrate material.
资助项目	Program for Liaoning Province Natural Science Foundation[20170540757] ; program for the Department of Education of Liaoning Province[LJZ2017041] ; program for the Department of Education of Liaoning Province[LJZ2017025] ; Scientific and Technological Transformative Project of Shenyang[Z17-7-027] ; Scientific and Technological Transformative Project of Shenyang[Z18-0-025] ; structural funds project PRO-DD (POS-CCE, O.2.2.1)[ID123] ; structural funds project PRO-DD (POS-CCE, O.2.2.1)[SMIS 2637] ; structural funds project PRO-DD (POS-CCE, O.2.2.1)[11/2009]
WOS研究方向	Chemistry ; Materials Science ; Physics
语种	英语
出版者	ELSEVIER
WOS记录号	WOS:000487838900046
资助机构	Program for Liaoning Province Natural Science Foundation ; program for the Department of Education of Liaoning Province ; Scientific and Technological Transformative Project of Shenyang ; structural funds project PRO-DD (POS-CCE, O.2.2.1)
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/135733]
专题	金属研究所_中国科学院金属研究所
通讯作者	Wu, Yuhou; Zhao, Dehong
作者单位	1.Shenyang Jianzhu Univ, Sch Mech Engn, Shenyang 110168, Liaoning, Peoples R China 2.Shenyang Jianzhu Univ, Natl Local Joint Engn Lab NC Machining Equipment, Shenyang 110168, Liaoning, Peoples R China 3.Transilvania Univ, Mat Sci Dept, Brasov 500036, Romania 4.Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China 5.Transilvania Univ, Mat Engn & Welding Dept, Brasov 500036, Romania
推荐引用方式 GB/T 7714	Yan, Guangyu,Wu, Yuhou,Cristea, Daniel,et al. Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition[J]. APPLIED SURFACE SCIENCE,2019,494:401-411.
APA	Yan, Guangyu.,Wu, Yuhou.,Cristea, Daniel.,Liu, Lusheng.,Tierean, Mircea.,...&Zhao, Dehong.(2019).Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition.APPLIED SURFACE SCIENCE,494,401-411.
MLA	Yan, Guangyu,et al."Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition".APPLIED SURFACE SCIENCE 494(2019):401-411.