Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties

	Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties
	Jiao Xu 1,2; Li Qiao 1; Zewen Duan 1; Dengji Guo 1; Liqiang Chai 1; Xiaoyu Zhao 1; Peng Wang 1; Weimin Liu 1
刊名	surface and interface analysis
	2020-04
期号	-页码:-
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/26908]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Peng Wang
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.Institute of Semiconductor Manufacturing Research, Shenzhen University
推荐引用方式 GB/T 7714	Jiao Xu,Li Qiao,Zewen Duan,et al. Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties[J]. surface and interface analysis,2020(-):-.
APA	Jiao Xu.,Li Qiao.,Zewen Duan.,Dengji Guo.,Liqiang Chai.,...&Weimin Liu.(2020).Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties.surface and interface analysis(-),-.
MLA	Jiao Xu,et al."Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties".surface and interface analysis .-(2020):-.