Combining Prior Knowledge With CNN for Weak Scratch Inspection of Optical Components
Hou, Wei1,2; Tao, Xian1,2; Xu, De1,2
刊名IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
2021
卷号70期号:1页码:11
关键词Convolutional neural network (CNN) direction-sensitive convolution (DSC) local maximum index (LMI) optical component weak scratch inspection
ISSN号0018-9456
DOI10.1109/TIM.2020.3011299
英文摘要

Scratches as the major defects in precision optical components are caused inevitably in the manufacturing process, which is harmful to the whole optical system. Most scratches on the surface of optical components are weak scratches with low contrast and uneven distribution of gray scale, which poses a significant problem for inspection. In this article, an end-to-end weak scratch inspection method based on novel scratch-enhancement methods and convolutional neural network (CNN) is proposed for optical components. To enhance weak scratches, a local maximum index (LMI) module and a direction-sensitive convolution (DSC) module are proposed to generate multilevel-feature maps using prior knowledge about scratch. Different from previous works utilizing the raw dark-field image as network input, these multilevel features are used as the inputs of encoder-decoder module for training. After training, the whole inspection model can infer weak scratches from raw dark-field test images in an end-to-end manner. Experimental results show that the proposed model achieves pixel accuracy of 92.48% and IoU at 77.27% on the test data set. It outperforms the networks without adding prior knowledge, which shows that prior knowledge is much helpful for weak scratch inspection. Moreover, compared with other classical methods and CNN-based methods, the proposed method achieves the best performance in the weak scratch inspection.

资助项目National Natural Science Foundation of China[61703399]
WOS关键词DEFECT DETECTION ; CLASSIFICATION ; SURFACES
WOS研究方向Engineering ; Instruments & Instrumentation
语种英语
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号WOS:000594910700047
资助机构National Natural Science Foundation of China
内容类型期刊论文
源URL[http://ir.ia.ac.cn/handle/173211/42773]  
专题精密感知与控制研究中心_精密感知与控制
通讯作者Tao, Xian
作者单位1.Univ Chinese Acad Sci, Sch Artificial Intelligence, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Res Ctr Precis Sensing & Control, Inst Automat, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714
Hou, Wei,Tao, Xian,Xu, De. Combining Prior Knowledge With CNN for Weak Scratch Inspection of Optical Components[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2021,70(1):11.
APA Hou, Wei,Tao, Xian,&Xu, De.(2021).Combining Prior Knowledge With CNN for Weak Scratch Inspection of Optical Components.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,70(1),11.
MLA Hou, Wei,et al."Combining Prior Knowledge With CNN for Weak Scratch Inspection of Optical Components".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 70.1(2021):11.
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