Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method
Gao, Guohan2; Wang, Lihua; Shi, Heng; Liu, Dun; Fan, Bin; Guan, Chunlin
刊名SCIENTIFIC REPORTS
2020-06-02
卷号10期号:1页码:9005-1-8
ISSN号2045-2322
DOI10.1038/s41598-020-65990-2
文献子类期刊论文
英文摘要

Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithography technique using vacuum assisted self contact method to fabricate large-aperture membrane diffractive lens. We fabricated a phi 400 mm aperture membrane off-axis 2-levels Fresnel Zone Lens (FZL) based on the method and achieved uniformly distributed photoresist morphology as well as over 36.6% average diffraction efficiency in full aperture. The results demonstrated that vacuum assisted self contact method effectively eliminates considerable air gaps caused by unevenness of large area photomask and substrate, thus facilitates uniform light field distribution in photoresist. This work provides reference to fabrication techniques of large aperture membrane diffractive lens, and offers feasible methods for future large area flexible electronics manufacturing.

出版地LONDON
WOS关键词Fabrication
WOS研究方向Science & Technology - Other Topics
语种英语
出版者NATURE PUBLISHING GROUP
WOS记录号WOS:000560800000003
内容类型期刊论文
源URL[http://ir.ioe.ac.cn/handle/181551/10135]  
专题薄膜光学相机总体室
作者单位1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Gao, Guohan,Wang, Lihua,Shi, Heng,et al. Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method[J]. SCIENTIFIC REPORTS,2020,10(1):9005-1-8.
APA Gao, Guohan,Wang, Lihua,Shi, Heng,Liu, Dun,Fan, Bin,&Guan, Chunlin.(2020).Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method.SCIENTIFIC REPORTS,10(1),9005-1-8.
MLA Gao, Guohan,et al."Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method".SCIENTIFIC REPORTS 10.1(2020):9005-1-8.
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