Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method | |
Gao, Guohan2; Wang, Lihua; Shi, Heng; Liu, Dun; Fan, Bin; Guan, Chunlin | |
刊名 | SCIENTIFIC REPORTS
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2020-06-02 | |
卷号 | 10期号:1页码:9005-1-8 |
ISSN号 | 2045-2322 |
DOI | 10.1038/s41598-020-65990-2 |
文献子类 | 期刊论文 |
英文摘要 | Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithography technique using vacuum assisted self contact method to fabricate large-aperture membrane diffractive lens. We fabricated a phi 400 mm aperture membrane off-axis 2-levels Fresnel Zone Lens (FZL) based on the method and achieved uniformly distributed photoresist morphology as well as over 36.6% average diffraction efficiency in full aperture. The results demonstrated that vacuum assisted self contact method effectively eliminates considerable air gaps caused by unevenness of large area photomask and substrate, thus facilitates uniform light field distribution in photoresist. This work provides reference to fabrication techniques of large aperture membrane diffractive lens, and offers feasible methods for future large area flexible electronics manufacturing. |
出版地 | LONDON |
WOS关键词 | Fabrication |
WOS研究方向 | Science & Technology - Other Topics |
语种 | 英语 |
出版者 | NATURE PUBLISHING GROUP |
WOS记录号 | WOS:000560800000003 |
内容类型 | 期刊论文 |
源URL | [http://ir.ioe.ac.cn/handle/181551/10135] ![]() |
专题 | 薄膜光学相机总体室 |
作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
推荐引用方式 GB/T 7714 | Gao, Guohan,Wang, Lihua,Shi, Heng,et al. Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method[J]. SCIENTIFIC REPORTS,2020,10(1):9005-1-8. |
APA | Gao, Guohan,Wang, Lihua,Shi, Heng,Liu, Dun,Fan, Bin,&Guan, Chunlin.(2020).Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method.SCIENTIFIC REPORTS,10(1),9005-1-8. |
MLA | Gao, Guohan,et al."Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method".SCIENTIFIC REPORTS 10.1(2020):9005-1-8. |
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