Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process
Zhong, Xianyun2; Fan, Bin; Wu, Fan
刊名OPTICAL REVIEW
2019-12-16
卷号27期号:1页码:14-22
关键词Magnetorheological Finishing Edge Effect Dwell Time Residual Errors
ISSN号1340-6000
DOI10.1007/s10043-019-00555-x
文献子类期刊论文
英文摘要

y A precise and efficient edge-controlled method is of importance to ensure the final performance of the optical system. The authors put forward a novel method to reduce the edge effect in the magnetorheological finishing (MRF) process through further analyzing the stability of the MRF edge tool influence function (TIF) and correcting the post-edge algorithm of dwell time. To demonstrate the feasibility and advantage of this edge-controlled theory, two mirror substrates are taken as the experimental samples. The Phi 200 mm, R-200 mm concave sphere mirror (fused silica) is removed about 3 mu m uniformly and the experimental results indicate that the edge error region can be effectively suppressed below 1.5 mm. Another Phi 610 mm, R-2100, K-1 lightweighting parabolic mirror is verified about the actual practicability. The residual error reaches RMS 6.5 nm from original RMS 182 nm after two run iterations; meanwhile, the edge effect is well controlled to a large extent. The simulations of edge error coincide well with the corresponding experimental results, which strongly verify the feasibility of the edge-suppressing theory presented in this paper.

出版地TOKYO
WOS关键词Tool
WOS研究方向Optics
语种英语
出版者OPTICAL SOC JAPAN
WOS记录号WOS:000519206300003
内容类型期刊论文
源URL[http://ir.ioe.ac.cn/handle/181551/10101]  
专题薄膜光学相机总体室
作者单位1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Zhong, Xianyun,Fan, Bin,Wu, Fan. Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process[J]. OPTICAL REVIEW,2019,27(1):14-22.
APA Zhong, Xianyun,Fan, Bin,&Wu, Fan.(2019).Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process.OPTICAL REVIEW,27(1),14-22.
MLA Zhong, Xianyun,et al."Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process".OPTICAL REVIEW 27.1(2019):14-22.
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