Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications

doi:10.1515/polyeng-2019-0177

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学相机总体室

	Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications
	Mao, Danbo; Lv, Gang; Gao, Guohan; Fan, Bin
刊名	Journal of Polymer Engineering
	2019
ISSN号	0334-6447
DOI	10.1515/polyeng-2019-0177
文献子类	期刊论文
英文摘要	Optical polyimide (PI) films were prepared by spin-coating from nearly non-volatile dimethylacetamide (DMAc) solutions. The uniformity of film thickness met the requirements of diffraction imaging quality. The results show that the final rotating speed ω, dynamic viscosity η, and initial polymer solid concentration c are the main factors affecting the film thickness T, and an empirical relationship which describes the film thickness as a function of the measured parameters was established to be T∞ c3.473, η0.586, ω-0.811. $T \propto w-3.473,&eta -0.586 rmω - 0.811.$ Moreover, the viscosity dependence on concentration is system specific. Unlike traditional photoresist, the thickness uniformity of the PI film is determined by both spinning and precure process, which is intensively discussed in the present work. Uniform, 22-μm thick, PI films with transmitted wavefronts peak to valley (PV) ≤ 1/5 λ and root mean square (RMS) ≤ 1/50 λ were prepared under the optimum process: spin speed 900 rpm, initial fluid viscosity 10,500 cp, final spin time 120 s, precure temperature 70°C, spin process repeated 3 times. The results will find use in the production of optical quality membrane for ultra-lightweight optics or other applications. ©2019 Walter de Gruyter GmbH, Berlin/Boston.
语种	英语
出版者	De Gruyter
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9735]
专题	薄膜光学相机总体室
作者单位	Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610200, China
推荐引用方式 GB/T 7714	Mao, Danbo,Lv, Gang,Gao, Guohan,et al. Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications[J]. Journal of Polymer Engineering,2019.
APA	Mao, Danbo,Lv, Gang,Gao, Guohan,&Fan, Bin.(2019).Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications.Journal of Polymer Engineering.
MLA	Mao, Danbo,et al."Fabrication of polyimide films with imaging quality using a spin-coating method for potential optical applications".Journal of Polymer Engineering (2019).