Correction algorithm of edge effects in inductively coupled plasma processing

doi:10.1016/j.ijleo.2020.165565

	Correction algorithm of edge effects in inductively coupled plasma processing
	Zhang, Shiyang 1,3; Fan, Bin 1,3; Wang, Yongjian 1,3; Xin, Qiang 1,3; Wu, Jie 2
刊名	Optik
	2020-12-01
卷号	223
ISSN号	0030-4026
DOI	10.1016/j.ijleo.2020.165565
文献子类	期刊论文
英文摘要	Atmospheric plasma processing is a new type of non-contact processing method. And it mainly aimed at the processing of optical components or freeform mirrors without surface damage. The edge effect in plasma processing will cause the removal function to be unstable, and the convergence efficiency will be reduced. Therefore, it is necessary to improve the stability of the removal function and reduce the edge effect. Therefore, in this paper, it will focus on the edge effect problem in plasma processing, analyze the cause of the edge effect, and propose solutions for the edge effect. And, it is found that the edge effect is caused by the removal function. The area which is influenced by the edge effect will be reduced when the size of the removal function is reduced. Moreover, it is found the relationship between the removal function and radial position. Finally, the processing error will be reduced from 20 % to 10 % with the correction algorithm, which is aimed at the dwell time algorithm. © 2020 Elsevier GmbH
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/10122]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.School of Mechanical Engineering, Sichuan University, Chengdu; 610065, China 3.University of Chinese Academy of Sciences, Beijing; 100049, China;
推荐引用方式 GB/T 7714	Zhang, Shiyang,Fan, Bin,Wang, Yongjian,et al. Correction algorithm of edge effects in inductively coupled plasma processing[J]. Optik,2020,223.
APA	Zhang, Shiyang,Fan, Bin,Wang, Yongjian,Xin, Qiang,&Wu, Jie.(2020).Correction algorithm of edge effects in inductively coupled plasma processing.Optik,223.
MLA	Zhang, Shiyang,et al."Correction algorithm of edge effects in inductively coupled plasma processing".Optik 223(2020).