Design and fabrication of a SiN-Si dual-layer optical phased array chip

	Design and fabrication of a SiN-Si dual-layer optical phased array chip
	Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan
刊名	PHOTONICS RESEARCH
	2020
卷号	8 期号:6 页码:912-919
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30261]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan. Design and fabrication of a SiN-Si dual-layer optical phased array chip[J]. PHOTONICS RESEARCH,2020,8(6):912-919.
APA	Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan.(2020).Design and fabrication of a SiN-Si dual-layer optical phased array chip.PHOTONICS RESEARCH,8(6),912-919.
MLA	Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan."Design and fabrication of a SiN-Si dual-layer optical phased array chip".PHOTONICS RESEARCH 8.6(2020):912-919.