電流アパーチャを備えた垂直キャビティレーザー | |
スコット,ジェフリー ダブリュ. | |
1998-05-26 | |
著作权人 | オプティカル コンセプツ,インコーポレイティド |
专利号 | JP1998505465A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | 電流アパーチャを備えた垂直キャビティレーザー |
英文摘要 | A vertical-cavity surface-emitting laser (VCSEL) has an active region, first and second mirror stacks forming a resonant cavity with a radial variation in index forming a transverse optical mode, and a thin insulating slot within the cavity to constrict the current to a diameter less than the beam waist of the optical mode thereby improving device efficiency and preferentially supporting single mode operation. In one embodiment, an insulating slot is formed by etching or selectively oxidizing a thin aluminum-containing semiconductor layer in towards the center of a cylindrical mesa. The slot thickness is sufficiently thin that the large index discontinuity has little effect on the transverse optical-mode pattern. The slot may be placed near an axial standing-wave null to minimize the perturbation of the index discontinuity and allow the use of thicker slots. In a preferred embodiment, the current constriction, formed by the insulating slot, is located on the p-type side of the active region and has a diameter significantly less than the beam waist of the optical mode, thus minimizing outward diffusion of carriers and ensuring single transverse-mode operation of the laser by suppressing spatial hole burning. |
公开日期 | 1998-05-26 |
申请日期 | 1996-06-19 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/93052] |
专题 | 半导体激光器专利数据库 |
作者单位 | オプティカル コンセプツ,インコーポレイティド |
推荐引用方式 GB/T 7714 | スコット,ジェフリー ダブリュ.. 電流アパーチャを備えた垂直キャビティレーザー. JP1998505465A. 1998-05-26. |
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