Manufacture of embedded semiconductor laser
IIDA CHIKAHIRO
1991-10-14
著作权人ANDO ELECTRIC CO LTD
专利号JP1991230590A
国家日本
文献子类发明申请
其他题名Manufacture of embedded semiconductor laser
英文摘要PURPOSE:To manufacture an embedded semiconductor laser by one time crystal growth by forming a current blocking layer on portions other than a current path including an active layer. CONSTITUTION:Strip-like first, second and third grooves 11, 12 and 13, respectively, are formed in a substrate 2 so as to be parallel to one another. A current blocking layer 3 is laminated except a portion between the first groove 11 and the third groove 13. A buffer layer 4 and an active layer 5 are sequentially laminated on the current blocking layer 3. further, a buffer layer 8 and an active layer 9 are sequentially laminated in the central second groove 12. A clad layer 6 is laminated over the whole surfaces of the active layers 5 and 9. The active layer 9 which becomes a light emitting region is formed in the central groove 12 among the three grooves. The two outside grooves 11 and 13 are formed to prevent the current blocking layer which is the first crystal growth layer from being laminated in the central groove 12. Further, the active layer 9 laminated in the central groove 12 is the light emitting region and, to operate in a stable single transverse mode, the width of the active layer 9, namely, the width of the central groove 12 is controlled within a range of some degree. Thus, a manufacture can be executed by one time crystal growth.
公开日期1991-10-14
申请日期1990-02-06
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/88635]  
专题半导体激光器专利数据库
作者单位ANDO ELECTRIC CO LTD
推荐引用方式
GB/T 7714
IIDA CHIKAHIRO. Manufacture of embedded semiconductor laser. JP1991230590A. 1991-10-14.
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