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	Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device
	KUDO, KOJI
	2001-07-19
著作权人	NEC CORPORATION
专利号	US20010008539A1
国家	美国
文献子类	发明申请
其他题名	Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device
英文摘要	In a method of manufacturing a semiconductor optical waveguide array in an ultra-high integration, the device yield per wafer is considerably increased and uniform and improved characteristics are obtained. In this method, there is manufactured a semiconductor optical waveguide array including a plurality of optical waveguides in an array structure in stripe-shaped growth regions enclosed by dielectric thin films on a substrate. The waveguides are fabricated through a selective crystal growth process and include a semiconductor multilayer structure including a quantum well layer or a semiconductor multilayer structure including a bulk layer. Namely, there is formed a plurality of stripe-shaped growth regions elongated parallel to each other, the regions being enclosed with a dielectric thin film. In each growth region, a semiconductor multilayer structure is selectively grown by metallo-organic vapor phase epitaxy (MOVPE). In the selective growth, the growth regions are parallel to each other with an interval therebetween, the interval being less than a diffusion length of a source material in a reactive tube during the crystal growth. Assuming that the dielectric thin film arranged between the respective growth regions has a width Wa and a first outer-most dielectric thin film and a second outer-most dielectric thin film arranged respectively outside of outer-most ones of the growth regions respectively have widths Wm1 and Wm2, there is satisfied a relationship of Wm1>Wa and Wm2>Wa.
公开日期	2001-07-19
申请日期	2001-01-26
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/88508]
专题	半导体激光器专利数据库
作者单位	NEC CORPORATION
推荐引用方式 GB/T 7714	KUDO, KOJI. Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device. US20010008539A1. 2001-07-19.

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