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	Conformal coatings for micro-optical elements
	MAULA, JARMO, ILMARI; TÖRNQVIST, RUNAR, OLOF, IVAR
	2004-11-04
著作权人	PLANAR SYSTEMS, INC.
专利号	WO2004095086A2
国家	世界知识产权组织
文献子类	发明申请
其他题名	Conformal coatings for micro-optical elements
英文摘要	A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure (90) having a surface with uneven structures is exposed one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film (92) conforms to surface structures having varying complex dimensions.
公开日期	2004-11-04
申请日期	2004-03-22
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/87736]
专题	半导体激光器专利数据库
作者单位	PLANAR SYSTEMS, INC.
推荐引用方式 GB/T 7714	MAULA, JARMO, ILMARI,TÖRNQVIST, RUNAR, OLOF, IVAR. Conformal coatings for micro-optical elements. WO2004095086A2. 2004-11-04.

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