Manufacture of semiconductor laser
NAMISAKI HIROBUMI
1990-09-19
著作权人MITSUBISHI ELECTRIC CORP
专利号JP1990237188A
国家日本
文献子类发明申请
其他题名Manufacture of semiconductor laser
英文摘要PURPOSE:To prevent the characteristic from decreasing even at a high temperature and in high output by installing a low-resistivity p-InP layer on an InGaAsP active layer, forming patterns in the two layers, and growing a high-resistivity p-InP layer thereon. CONSTITUTION:An active layer 1 and a first semiconductor layer 20 joined thereto by heterojunction are grown on a semiconductor substrate 10 and selectively etched into groove form to separate part of the layers from other parts. A semiconductor crystal 2 of composition to join to the active layer 1 by heterojunction and including a layer of the same conductivity type as the first semiconductor 20 and lower impurity concentration than the two semiconductor layers is grown to fill the grooves and bury the surface of the first semiconductor layer 20. Therefore, the series resistance values of two current paths are different and the resistance of the current path flowing to an active region is lower than that of a leak path, therefore, the decrease of the voltage of the current path passed through the active layer 1 becomes relatively little. Thereby a current flows intensively to the active region to prevent the characteristic from decreasing even at a high temperature and in high output.
公开日期1990-09-19
申请日期1989-03-10
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/87426]  
专题半导体激光器专利数据库
作者单位MITSUBISHI ELECTRIC CORP
推荐引用方式
GB/T 7714
NAMISAKI HIROBUMI. Manufacture of semiconductor laser. JP1990237188A. 1990-09-19.
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