Buried semiconductor laser | |
MITO IKUO | |
1986-04-17 | |
著作权人 | NEC CORP |
专利号 | JP1986075585A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Buried semiconductor laser |
英文摘要 | PURPOSE:To manufacture an element which exhibits stable basic lateral mode oscillator in a high yield by forming semiconductor layers having large refrac tive indexes on both sides of an active layer with good reproducibility. CONSTITUTION:Two parallel grooves 50, 51 are formed between mesa stripes 52 which contains active layers to become light emitting regions by selectively etching to the active layers 3 on a multilayer film substrate laminated with a plurality of layers including an InGaAsP active layer 3 on an N type InP substrate At least three layers of an InGaAsP 4-dimensional buried layer 6 for coating the side of the active layer in a mesa stripe, a P type InP current block layer 7 and an N type InP current enclosure layer 8 are formed by not laminating on the top of the stripe 52, and a P type InP buried layer 9 and a P type InGaAsP electrode forming layer 10 are laminated over the entire surface. The layer 6 is always grown over the layer 3 and the side of the layer 4 by controlling the thickness of the grown film. Thus, an element which oscillates in a stable basic lateral mode is obtained in a very high yield. |
公开日期 | 1986-04-17 |
申请日期 | 1984-09-20 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/87029] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NEC CORP |
推荐引用方式 GB/T 7714 | MITO IKUO. Buried semiconductor laser. JP1986075585A. 1986-04-17. |
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