Semiconductor laser device | |
KOIZUMI YOSHIHIRO | |
1989-07-31 | |
著作权人 | NEC CORP |
专利号 | JP1989189984A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser device |
英文摘要 | PURPOSE:To obtain the high yield of a nondefective element by introducing a novel device structure to a high-resistance semiconductor layer buried type semiconductor laser. CONSTITUTION:A reverse mesa 13 composed of a (111)A face is formed up to a depth which does not reach an active region 15 in the mesa parallel with the direction. A forward mesa 16 consisting of a (111)B face is shaped up to a depth reaching a substrate 17 including the active region 15, and a section from the surface of he substrate 17 to the height of the head section of the mesa is embedded in a high-resistance semiconductor layer 14. A buried layer 60 is buried and grown only on a (100) face on both sides of an active region 65 at that time, there are low resistance regions 68 only on both sides of the projecting side faces of both mesas in the (111)A faces, and currents are confined effectively only into the active region 65, thus acquiring a semiconductor laser having low threshold currents and small parasitic capacitance. Accordingly, an excellent high-resistance buried layer is obtained, thus largely improving the yield of a nondefective element. |
公开日期 | 1989-07-31 |
申请日期 | 1988-01-26 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/86691] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NEC CORP |
推荐引用方式 GB/T 7714 | KOIZUMI YOSHIHIRO. Semiconductor laser device. JP1989189984A. 1989-07-31. |
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