Distributed feedback type semiconductor laser
KOBAYASHI ISAO
1984-09-18
著作权人NIPPON DENKI KK
专利号JP1984165481A
国家日本
文献子类发明申请
其他题名Distributed feedback type semiconductor laser
英文摘要PURPOSE:To obtain a distributed feedback type semiconductor laser which has small internal reflection light, stable operation characteristics and high reproducibility of crystal growth by gradually reducing the shape of a mesa stripe at the longitudinal end in a converged shape. CONSTITUTION:After a diffraction grating 2 is formed by a 2-luminous flux interfering method and a chemically etching method on an InP substrate 1 of N type 001 orientation, a photowaveguide layer 3 of N type InGaAsP, an InGaAsP, active layer 4 and a P type InP clad layer 5 are formed by a liquid phase growth method. Subsequently, it is formed in a flat disc shape by a photolithographic method and a chemically etching method. In other words, an active unit 10 made of the grating 2, the layer 3, the layer 4 and the layer 5 is composed of a parallel region 11 having substantially constant width and a transition region 12 in which the width of the longitudinal end is gradually reduced in a converted shape, and formed of two slots 13, 14. Thereafter, a P type InP current block layer 6 and an N type InP current block layer 7 are formed on the surface except the upper part of the layer 5 of the unit 10 again by the liquid phase growth.
公开日期1984-09-18
申请日期1983-03-10
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/83517]  
专题半导体激光器专利数据库
作者单位NIPPON DENKI KK
推荐引用方式
GB/T 7714
KOBAYASHI ISAO. Distributed feedback type semiconductor laser. JP1984165481A. 1984-09-18.
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