Semiconductor device and manufacturing method thereof
TAKADA, KAN; AOKI, OSAMU; YAMAMOTO, TSUYOSHI
2006-09-21
著作权人FUJITSU LIMITED
专利号US20060209914A1
国家美国
文献子类发明申请
其他题名Semiconductor device and manufacturing method thereof
英文摘要In order to reduce the parasitic capacitance of the device and obtain an enhanced high-speed response characteristic while assuring the reliability of the device, a semiconductor device is provided such that it comprises: a mesa structure formed on a semiconductor substrate and including a first cladding layer, an active layer, a second cladding layer, a first protective layer and a second protective layer each covering respective side of the active layer, and a cap layer formed between the first protective layer and the second protective layer and covering the top surface of the active layer, wherein aluminum is included only in the active layer; and a buried layer for burying the mesa structure, wherein the first cladding layer, the first protective layer, the second protective layer, and the second cladding layer constitute the side of the mesa structure.
公开日期2006-09-21
申请日期2005-10-25
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/83312]  
专题半导体激光器专利数据库
作者单位FUJITSU LIMITED
推荐引用方式
GB/T 7714
TAKADA, KAN,AOKI, OSAMU,YAMAMOTO, TSUYOSHI. Semiconductor device and manufacturing method thereof. US20060209914A1. 2006-09-21.
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace