Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy

doi:10.1109/ICEDME50972.2020.00129

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 光学影像学习与分析中心

	Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy
	Tian, Feifei 1,2; Li, Siyuan 2
	2020-05
会议日期	2020-05-01
会议地点	Suzhou, China
关键词	supporting mechanism FTS maximum range of travel tilt shear
DOI	10.1109/ICEDME50972.2020.00129
页码	540-544
英文摘要	Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments. © 2020 IEEE.
产权排序	1
会议录	Proceedings - 2020 3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020
会议录出版者	Institute of Electrical and Electronics Engineers Inc.
语种	英语
ISBN号	9781728181455
内容类型	会议论文
源URL	[http://ir.opt.ac.cn/handle/181661/93590]
专题	西安光学精密机械研究所_光学影像学习与分析中心
通讯作者	Li, Siyuan
作者单位	1.University of Chinese Academy of Sciences, Beijing, China 2.Chinese Academy of Sciences, Xi'An Institute of Optics and Precision Mechanics, Xi'an, China;
推荐引用方式 GB/T 7714	Tian, Feifei,Li, Siyuan. Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy[C]. 见:. Suzhou, China. 2020-05-01.