Calibration of geometrical aberration in transmitted wavefront testing of refractive optics with deflectometry
Wang, Daodang3,4,5; Yin, Yamei6; Dou, Jinchao4; Kong, Ming4; Xu, Xinke4; Lei, Lihua1; Liang, Rongguang2
刊名Applied Optics
2021-03-01
卷号60期号:7页码:1973-1981
ISSN号1559128X;21553165
DOI10.1364/AO.415715
产权排序4
英文摘要

Deflectometry, with its noticeable advantages such as simple structure, large dynamic range, and high accuracy comparable to interferometry, has been one of the powerful metrological techniques for optical surfaces in recent years. In the "null" deflectometric transmitted wavefront testing of refractive optics, ray tracing of the test system model is required, in which both the miscalibration of system geometrical parameters and optical tolerances on tested optics could introduce significant geometrical aberrations in the testing results. In this paper, the geometrical aberration introduced by a system modeling error in the transmitted wavefront testing is discussed. Besides, a calibration method based on polynomial optimization of geometrical aberration is presented for the geometrical aberration calibration. Both simulation and experiment have been performed to validate the feasibility of the proposed calibration method. The proposed method can calibrate the optical tolerances on tested optics effectively, and it is feasible even with a large geometric error, providing a viable way to address the uncertainty in system modeling in transmitted wavefront testing of freeform refractive optics with large dynamic range. © 2021 Optical Society of America

语种英语
出版者The Optical Society
WOS记录号WOS:000624969800024
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/94604]  
专题西安光学精密机械研究所_研究生部
通讯作者Wang, Daodang
作者单位1.Shanghai Key Lab. of Online Test and Control Technology, Shanghai Institute of Measurement and Testing Technology, Shanghai; 201203, China;
2.James C. Wyant College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States
3.College of Energy Engineering, Zhejiang University, Hangzhou; 310027, China;
4.College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou; 310018, China;
5.Wenzhou Research Institute of Zhejiang University, Wenzhou; 325006, China;
6.Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an; 710119, China;
推荐引用方式
GB/T 7714
Wang, Daodang,Yin, Yamei,Dou, Jinchao,et al. Calibration of geometrical aberration in transmitted wavefront testing of refractive optics with deflectometry[J]. Applied Optics,2021,60(7):1973-1981.
APA Wang, Daodang.,Yin, Yamei.,Dou, Jinchao.,Kong, Ming.,Xu, Xinke.,...&Liang, Rongguang.(2021).Calibration of geometrical aberration in transmitted wavefront testing of refractive optics with deflectometry.Applied Optics,60(7),1973-1981.
MLA Wang, Daodang,et al."Calibration of geometrical aberration in transmitted wavefront testing of refractive optics with deflectometry".Applied Optics 60.7(2021):1973-1981.
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