Research on measurement optical axis eccentricity and fitting method of aspheric mirror
Fu, Xi Hong; Li, Shuo; Xue, Li; Kang, Shi-Fa; Zheng, Xiang-Ke; Ma, Na-Na; Dang, Qian
2020
会议日期2019-10-26
会议地点Beijing, China
关键词Aspheric mirror Optical axis CMM Measurement coordinate system Eccentricity test
卷号11439
DOI10.1117/12.2550273
英文摘要

A method to measurement of optical axis eccentricity and fitting about the aspheric mirror with the high-precision three-coordinate measuring machine(CMM) is presented. By establishing 2d/3d measurement coordinate system, The axis of fitting of the cylinder is selected according to the machining and assembly reference of aspheric mirror, Generating a number of concentric circles automatic measurement strategies, And make the points on each equal circumference, The probe head of the CMM is sampled on the surface of the measured aspheric mirror according to the measured strategy path to obtain the point coordinates of the distance of the reference axis, the measured surface is fitted to obtain the eccentricity of the aspheric mirror optical axis. Hyperboloid concave mirror to make use of the proposed method in the practical testing, the results show the actual processing of eccentricity is 0.0190mm, the standard deviation of 3.6×10-4mm, to meet the requirements of the design of eccentricity is less than or equal to 0.02mm.And testing the high precision centering lathe cutting machine frame fixed axis aspheric reflector components, the data indicators meet the requirements of assembly process. The accuracy of this method is high, and the traditional measuring method is easy to be affected by the precision of the tooling and easy to scratch the mirror. With large work surface, large caliber, back light weight loss (special-shaped structure) of aspheric mirrors optical axis eccentricity detection, not only suitable for different aperture aspheric mirrors the processing quality of qualified determination, but also in the machining, high precision of aspheric mirrors system with adjustable guiding role and effectively promote R-C spherical reflector optical system assembly accuracy and efficiency. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

产权排序1
会议录2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
会议录出版者SPIE
语种英语
ISSN号0277786X;1996756X
ISBN号9781510636569
WOS记录号WOS:000558337500058
内容类型会议论文
源URL[http://ir.opt.ac.cn/handle/181661/93368]  
专题西安光学精密机械研究所_系统工程部
通讯作者Fu, Xi Hong
作者单位Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China
推荐引用方式
GB/T 7714
Fu, Xi Hong,Li, Shuo,Xue, Li,et al. Research on measurement optical axis eccentricity and fitting method of aspheric mirror[C]. 见:. Beijing, China. 2019-10-26.
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