Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering

doi:10.1016/j.jnucmat.2020.152151

	Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering
	Wang, Le 1,2; Fan, Qunbo 1,2; Hao, Ting 3; Wang, Duoduo 1,2; Zhu, Xinjie 1,2; Gong, Haichao 1,2; Liu, Xin 2
刊名	JOURNAL OF NUCLEAR MATERIALS
	2020-06-01
卷号	534
关键词	Magnetron sputtering He-charged W films Microstructure Thermal desorption He bubbles Hardness
ISSN号	0022-3115
DOI	10.1016/j.jnucmat.2020.152151
通讯作者	Fan, Qunbo(fanqunbo@bit.edu.cn)
英文摘要	In order to study the effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film, He-charged W films on Si substrates were fabricated by a radio frequency (RF) magnetron sputtering device in different He/Ar mixture gases. The deposited W films had a typical columnar structure, and the grain size of W films decreased as He/Ar ratio increased by means of the observation of scanning electron microscopy (SEM). X-ray diffraction (XRD) analysis confirmed that W films had a typical bcc structure, and the introduced He atoms can refine grain size and increase the lattice strain. TEM analysis showed that large numbers of He bubbles can be formed inWfilms, as well as the size and density of these He bubbles increased with the increase of the He/Ar ratio. The shape of He bubbles trapped by different sites also had some differences. Thermal desorption spectra (TDS) revealed that He content increased with He/Ar ratio increasing and different types of He atoms could be introduced into W films. The hardness value measured by nanoindentation tests increased with He/Ar ratio increasing, which demonstrated that nano-sized He bubbles could strengthen W films. (C) 2020 Elsevier B.V. All rights reserved.
资助项目	National Natural Science Foundation of China[51571031] ; National Natural Science Foundation of China[11775255]
WOS关键词	ION-IMPLANTATION ; HELIUM ; TUNGSTEN ; IRRADIATION ; PLASMA ; EVOLUTION ; REACTOR ; EXPOSURE ; HARDNESS ; BUBBLES
WOS研究方向	Materials Science ; Nuclear Science & Technology
语种	英语
出版者	ELSEVIER
WOS记录号	WOS:000535459400011
资助机构	National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/103139]
专题	中国科学院合肥物质科学研究院
通讯作者	Fan, Qunbo
作者单位	1.Beijing Inst Technol, Chongqing Innovat Ctr, Chongqing 401135, Peoples R China 2.Beijing Inst Technol, Sch Mat Sci & Engn, Natl Key Lab Sci & Technol Mat Shock & Impact, Beijing 100081, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Wang, Le,Fan, Qunbo,Hao, Ting,et al. Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering[J]. JOURNAL OF NUCLEAR MATERIALS,2020,534.
APA	Wang, Le.,Fan, Qunbo.,Hao, Ting.,Wang, Duoduo.,Zhu, Xinjie.,...&Liu, Xin.(2020).Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering.JOURNAL OF NUCLEAR MATERIALS,534.
MLA	Wang, Le,et al."Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering".JOURNAL OF NUCLEAR MATERIALS 534(2020).