The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film

doi:10.1016/j.tsf.2020.138184

	The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film
	Wang, Le 1,4; Hao, Ting 4; Zhao, Bang-Lei 3,4; Liu, Rui 4; Fang, Qian-Feng 4; Liu, Chang-Song 4; Wang, Xian-Ping 4; Cao, Lei 2; Chen, Jun-Ling 2
刊名	THIN SOLID FILMS
	2020-09-01
卷号	709
关键词	He bubbles Helium-charged tungsten film Thermal desorption Thin film Magnetron sputtering Yttrium oxide
ISSN号	0040-6090
DOI	10.1016/j.tsf.2020.138184
通讯作者	Hao, Ting(hao.ting@issp.ac.cn)
英文摘要	He-charged W films and He-charged W-Y2O3 films have been fabricated by RF magnetron sputtering in a mixed atmosphere of He and Ar. The growth mechanism of He bubbles/blisters in He-charged W/W-Y(2)O(3)3 films was investigated by the isochronal annealing at different temperatures (773 K, 973 K, and 1273 K, respectively). Compared with the case of He-charged W film without Y2O3 addition, Y(2)O(3 )addition restrain obviously He blistering in He-charged W-Y2O3 film. It seems that the addition of Y2O3 can inhibit in some extent the growth of He bubbles in W-Y2O3 film according to transmission electron microscopy observations. Thermal desorption spectroscopy analysis indicates that there are five He desorption peaks within the range of 1273 K in both the asdeposited He-charged W/W-Y2O3 films, and it exists as well as an inhibiting effect of Y2O3 addition on the entrapping or de-trapping of He atoms in W-Y2O3 film.
资助项目	National Key R&D Program of China[2017YFE0300403] ; National Natural Science Foundation of China[11775255] ; National Natural Science Foundation of China[5171181] ; National Natural Science Foundation of China[11374299] ; National Natural Science Foundation of China[11575231] ; National Natural Science Foundation of China[11674319] ; National Natural Science Foundation of China[51771184]
WOS关键词	THERMAL-DESORPTION ; HELIUM ; TUNGSTEN ; COMPOSITES ; IRRADIATION
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000561800500014
资助机构	National Key R&D Program of China ; National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/70515]
专题	中国科学院合肥物质科学研究院
通讯作者	Hao, Ting
作者单位	1.Beijing Inst Technol, Chongqing Innovat Ctr, Chongqing 401135, Peoples R China 2.Chinese Acad Sci ASIPP, Inst Plasma Phys, POB 1126, Hefei 230031, Peoples R China 3.Univ Sci & Technol China, Hefei 230026, Peoples R China 4.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Wang, Le,Hao, Ting,Zhao, Bang-Lei,et al. The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film[J]. THIN SOLID FILMS,2020,709.
APA	Wang, Le.,Hao, Ting.,Zhao, Bang-Lei.,Liu, Rui.,Fang, Qian-Feng.,...&Chen, Jun-Ling.(2020).The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film.THIN SOLID FILMS,709.
MLA	Wang, Le,et al."The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film".THIN SOLID FILMS 709(2020).