Investigation of the Mechanical Properties of Thin Films by Nanoindentation, Considering the Effects of Thickness and Different Coating-Substrate Combinations

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	Investigation of the Mechanical Properties of Thin Films by Nanoindentation, Considering the Effects of Thickness and Different Coating-Substrate Combinations
	Chen SH(陈少华); Liu L(刘磊); Wang ZQ(王自强)
刊名	Surface & Coatings Technology
	2005
通讯作者邮箱	chenshaohua72@hotmail.com
卷号	191 期号:1 页码:25-32
ISSN号	0257-8972
通讯作者	Chen, SH (reprint author), Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China.
中文摘要	In order to further investigate nanoindentation data of film-substrate systems and to learn more about the mechanical properties of nanometer film-substrate systems, two kinds of films on different substrate systems have been tested with a systematic variation in film thickness and substrate characteristics. The two kinds of films are aluminum and tungsten, which have been sputtered on to glass and silicon substrates, respectively. Indentation experiments were performed with a Nano Indent XP II with indenter displacements typically about two times the nominal film thicknesses. The resulting data are analyzed in terms of load-displacement curves and various comparative parameters, such as hardness, Young's modulus, unloading stiffness and elastic recovery. Hardness and Young's modulus are investigated when the substrate effects are considered. The results show how the composite hardness and Young's modulus are different for different substrates, different films and different film thicknesses. An assumption of constant Young's modulus is used for the film-substrate system, in which the film and substrate have similar Young's moduli. Composite hardness obtained by the Joslin and Oliver method is compared with the directly measured hardness obtained by the Oliver and Pharr method.
学科主题	力学
类目[WOS]	Materials Science, Coatings & Films ; Physics, Applied
研究领域[WOS]	Materials Science ; Physics
关键词[WOS]	WEAR-RESISTANT COATINGS ; ELASTIC-MODULUS ; INDENTATION EXPERIMENTS ; SPHERICAL INDENTATION ; HARD SUBSTRATE ; COATED SYSTEMS ; INDENTERS ; CONTACT ; TESTS
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000225583400004
公开日期	2007-06-15 ; 2007-12-05 ; 2009-06-23
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/16009]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Chen SH,Liu L,Wang ZQ. Investigation of the Mechanical Properties of Thin Films by Nanoindentation, Considering the Effects of Thickness and Different Coating-Substrate Combinations[J]. Surface & Coatings Technology,2005,191(1):25-32.
APA	陈少华,刘磊,&王自强.(2005).Investigation of the Mechanical Properties of Thin Films by Nanoindentation, Considering the Effects of Thickness and Different Coating-Substrate Combinations.Surface & Coatings Technology,191(1),25-32.
MLA	陈少华,et al."Investigation of the Mechanical Properties of Thin Films by Nanoindentation, Considering the Effects of Thickness and Different Coating-Substrate Combinations".Surface & Coatings Technology 191.1(2005):25-32.