Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering

doi:10.1016/j.ceramint.2019.06.231

	Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering
	Liu, Meng; Yang, Yong; Wei, Yuquan; Li, Yajie; Zhang, Heng; Liu, Xuejian; Huang, Zhengren
刊名	CERAMICS INTERNATIONAL
	2019-11-01
卷号	45 期号:16 页码:19771
关键词	SiC Dense High-purity Pressureless solid-state-sintering
ISSN号	0272-8842
DOI	10.1016/j.ceramint.2019.06.231
文献子类	Article
英文摘要	High-purity SiC materials have been used in semiconductor processes due to their excellent properties. However, they are difficult to densify without sintering aids. In this work, dense and high-purity SiC ceramics have been obtained by pressureless solid-state-sintering with ultra-low contents of sintering additives. The amount of residual B, C and O in the high-purity SiC ceramics was less than 0.15 wt%, respectively, and the total content of other impurity elements (such as aluminum, magnesium, calcium, iron, etc.) was less than 0.015 wt%. Finally, the purity of the as-prepared SiC ceramics was more than 99.5 wt%.
WOS研究方向	Materials Science
语种	英语
出版者	ELSEVIER SCI LTD
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/26739]
专题	中国科学院上海硅酸盐研究所
推荐引用方式 GB/T 7714	Liu, Meng,Yang, Yong,Wei, Yuquan,et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. CERAMICS INTERNATIONAL,2019,45(16):19771.
APA	Liu, Meng.,Yang, Yong.,Wei, Yuquan.,Li, Yajie.,Zhang, Heng.,...&Huang, Zhengren.(2019).Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering.CERAMICS INTERNATIONAL,45(16),19771.
MLA	Liu, Meng,et al."Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering".CERAMICS INTERNATIONAL 45.16(2019):19771.