One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions

doi:10.1016/j.carbon.2019.04.011

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	One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions
	Zhou Yuying; Li Shimin; Wang Ying; Huang Qing; Zhang Wei; Yao Yao; Hao Jiaming; sun yan; Tang Ming; Li Bin
刊名	CARBON
	2019
卷号	148 期号:无页码:387-393
关键词	FIELD-EMISSION LITHOGRAPHY FABRICATION TEMPLATE GRAPHENE DEFECTS TIP
DOI	10.1016/j.carbon.2019.04.011
英文摘要	The fabrication and design of high-quality three-dimensional (3D) micro/nanostructures are of great importance for the development of new technology. Herein, we report a one-step technique to controllably manufacture 3D micro/nanopatterned structures with tunable work functions in silicon carbide (SiC). The multiscale micro/nanopatterned structures were produced directly by ion beam irradiation-induced swelling with the assistance of masks. The minimum feature size was similar to 52 nm and the swelling height could be controlled flexibly from similar to 1 to similar to 250 nm. The change of work function of the 3D SiC micro/nanostructures could be tuned in the range between 0 and similar to 126.6 meV. Distinct rectifying junction behavior was demonstrated between the irradiated and unirradiated zones. The Young's modulus and hardness values of the irradiated zones stabilized at similar to 298.1 GPa and similar to 24.9 GPa, respectively. (C) 2019 Elsevier Ltd. All rights reserved.
WOS记录号	WOS:000468421900042
内容类型	期刊论文
源URL	[http://202.127.2.71:8080/handle/181331/12393]
专题	上海技术物理研究所_上海技物所
推荐引用方式 GB/T 7714	Zhou Yuying,Li Shimin,Wang Ying,et al. One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions[J]. CARBON,2019,148(无):387-393.
APA	Zhou Yuying.,Li Shimin.,Wang Ying.,Huang Qing.,Zhang Wei.,...&Yan Long.(2019).One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions.CARBON,148(无),387-393.
MLA	Zhou Yuying,et al."One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions".CARBON 148.无(2019):387-393.