A piezoelectric deformable X-ray mirror for phase compensation based on global optimization

doi:10.1107/S1600577519003047

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	A piezoelectric deformable X-ray mirror for phase compensation based on global optimization
	Jiang, H ; Tian, NX ; Liang, DX ; Du, GH ; Yan, S
刊名	JOURNAL OF SYNCHROTRON RADIATION
	2019
卷号	26 期号:-页码:729—736
关键词	AT-WAVELENGTH METROLOGY IN-SITU METROLOGY
ISSN号	0909-0495
DOI	10.1107/S1600577519003047
文献子类	期刊论文
英文摘要	As a strong tool for the study of nanoscience, the synchrotron hard X-ray nanoprobe technique enables researchers to investigate complex samples with many advantages, such as insitu setup, high sensitivity and the integration of various experimental methods. In recent years, an important goal has been to push the focusing spot size to the diffraction limit of approximate to 10nm. The multilayer-based Kirkpatrick-Baez (KB) mirror system is one of the most important methods used to achieve this goal. This method was chosen by the nanoprobe beamline of the Phase-II project at the Shanghai Synchrotron Radiation Facility. To overcome the limitations of current polishing technologies, the use of an additional phase compensator was necessary to decrease the wavefront distortions. In this experiment, a prototype phase compensator has been created to show how to obtain precise wavefront compensation. With the use of finite-element analysis and Fizeau interferometer measurements, some important factors such as the piezoresponse, different actuator distributions, stability and hysteresis were investigated. A global optimization method based on the measured piezoresponse has also been developed. This method overcame the limitations of the previous local algorithm related to the adjustment of every single actuator for compact piezoelectric layouts. The mirror figure can approach a target figure after several iterations. The figure difference can be reduced to several nanometres, which is far better than the mirror figure errors. The prototype was also used to successfully compensate for the real wavefront errors from upstream and for its own figure errors, measured using the speckle scanning technique. The residual figure error was reduced to a root-mean-square value of 0.7nm.
语种	英语
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/31452]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
作者单位	1.Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai Synchrotron Radiat Facil, Zhangheng Rd 239, Shanghai 201204, Peoples R China; 2.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China
推荐引用方式 GB/T 7714	Jiang, H,Tian, NX,Liang, DX,et al. A piezoelectric deformable X-ray mirror for phase compensation based on global optimization[J]. JOURNAL OF SYNCHROTRON RADIATION,2019,26(-):729—736.
APA	Jiang, H,Tian, NX,Liang, DX,Du, GH,&Yan, S.(2019).A piezoelectric deformable X-ray mirror for phase compensation based on global optimization.JOURNAL OF SYNCHROTRON RADIATION,26(-),729—736.
MLA	Jiang, H,et al."A piezoelectric deformable X-ray mirror for phase compensation based on global optimization".JOURNAL OF SYNCHROTRON RADIATION 26.-(2019):729—736.