Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors

doi:10.1063/1.5096225

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2019专题

	Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors
	Ma, Xin ; Guo, Peng ; Tong, Xiaoshan ; Zhao, Yulong ; Zhang, Qi ; Ke, Peiling ; Wang, Aiying
刊名	APPLIED PHYSICS LETTERS
	2019
卷号	114 期号:25
关键词	DIAMOND-LIKE CARBON GAUGE FACTOR TRANSPORT STRAIN RAMAN
DOI	10.1063/1.5096225
英文摘要	Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/18203]
专题	2019专题
作者单位	1.Wang, AY (reprint author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 2.Wang, AY (reprint author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China. 3.Zhang, Q (reprint author), Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian 710049, Shaanxi, Peoples R China.
推荐引用方式 GB/T 7714	Ma, Xin,Guo, Peng,Tong, Xiaoshan,et al. Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors[J]. APPLIED PHYSICS LETTERS,2019,114(25).
APA	Ma, Xin.,Guo, Peng.,Tong, Xiaoshan.,Zhao, Yulong.,Zhang, Qi.,...&Wang, Aiying.(2019).Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors.APPLIED PHYSICS LETTERS,114(25).
MLA	Ma, Xin,et al."Piezoresistive behavior of amorphous carbon films for high performance MEMS force sensors".APPLIED PHYSICS LETTERS 114.25(2019).