Semiconductor laser device
HASEGAWA MITSUTOSHI; HARA TOSHITAMI; NOJIRI HIDEAKI; SEKIGUCHI YOSHINOBU; MIYAZAWA SEIICHI
1987-11-20
著作权人CANON INC
专利号JP1987268175A
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To eliminate an error on positioning and the limitation of integration density by making each optical outgoing direction differ at a point of time when beams from a semiconductor laser are emitted from resonance surfaces, forming one of each resonance surface by cleavage and shaping the other by etching. CONSTITUTION:An N-type GaAs layer 4, an N-type AlGaAs layer 7, a non- doped GaAs layer 8, a P-type AlGaAs layer 9 and a P-type GaAs layer 10 are grown on an N-type GaAs substrate 5 in succession, the whole surface is coated with an silicon nitride plasma CVD film, and current injection regions 11a-11c and photodetector 2a-2c sections are removed through etching, and covered with Cr and Au laminated electrodes 11, 12. The electrodes 11, 12 isolate each laser 1a-1c or the photodetector 2a-2c sections so as to be able to independently drive them. An alloy electrode 13 consisting of Au and Ge is shaped onto the back, the surface is processed vertically in a Cl2 gas atmosphere, and a groove 14 and resonator surfaces 15 are formed, and isolated by cleavage or cutting at every unit. Accordingly, semiconductor emitters and the photodetectors are easily integrated, thus stabilizing an optical output.
公开日期1987-11-20
申请日期1986-05-16
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/81931]  
专题半导体激光器专利数据库
作者单位CANON INC
推荐引用方式
GB/T 7714
HASEGAWA MITSUTOSHI,HARA TOSHITAMI,NOJIRI HIDEAKI,et al. Semiconductor laser device. JP1987268175A. 1987-11-20.
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