Semiconductor laser
NAMISAKI HIROBUMI
1989-07-20
著作权人MITSUBISHI ELECTRIC CORP
专利号JP1989183191A
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To reduce an operation current and to simply form electrodes by narrowing an interval between impurity diffused regions at an active layer position to be diffused with the impurity near an active layer as compared with the width of a clad layer of an electrode forming side. CONSTITUTION:A p-type impurity of Zn, Be or the like is implanted by an ion implanting method to a surface including a MQW active layer 1 of a region etched at both sides for holding a stripe, thereby forming an ion implanted region 60. Then, a mask 50 is removed, the implanted impurity is diffused and moved by heat treating so that the interval between the diffused parts becomes 2mum or less at the layer In this case, the thickness of an n-type AlGaAs clad layer 2 is sufficiently increased to eliminate the influence of the diffused part to an n-type GaAs contact layer 20, and a p-type electrode 100 and an n-type electrode 101 are eventually formed. Thus, the threshold value of an operation current can be reduced, and a laser having a stable oscillation mode is obtained.
公开日期1989-07-20
申请日期1988-01-14
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/79440]  
专题半导体激光器专利数据库
作者单位MITSUBISHI ELECTRIC CORP
推荐引用方式
GB/T 7714
NAMISAKI HIROBUMI. Semiconductor laser. JP1989183191A. 1989-07-20.
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