Semiconductor device and method of manufacturing the same
KASHIMA, YASUMASA; MUNAKATA, TSUTOMU
2003-05-27
著作权人OKI SEMICONDUCTOR CO., LTD.
专利号US6570189
国家美国
文献子类授权发明
其他题名Semiconductor device and method of manufacturing the same
英文摘要A semiconductor device includes a substrate formed of a group III element and a group V element, a buffer layer having a thickness of at least 0.5 mum covering an the entire main surface of the substrate, and a selective-area growth layer grown selectively on the buffer layer. The buffer layer includes both the group III element and the group V element. The buffer layer is formed by metalorganic vapor-phase epitaxy.
公开日期2003-05-27
申请日期1999-12-07
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/77489]  
专题半导体激光器专利数据库
作者单位OKI SEMICONDUCTOR CO., LTD.
推荐引用方式
GB/T 7714
KASHIMA, YASUMASA,MUNAKATA, TSUTOMU. Semiconductor device and method of manufacturing the same. US6570189. 2003-05-27.
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