Semiconductor laser element
KANEIWA SHINJI; HAYASHI HIROSHI; MIYAUCHI NOBUYUKI; KASAI SHUSUKE; MORIMOTO TAIJI
1990-08-29
著作权人SHARP CORP
专利号JP1990216884A
国家日本
文献子类发明申请
其他题名Semiconductor laser element
英文摘要PURPOSE:To obtain a semiconductor laser element which can operate with a low current, has a structure capable of being manufactured with satisfactory reproducibility and high reliability by providing two stripelike grown control layers elongated in a resonator direction at a lateral interval in a multilayer structure and containing Al, and forming an active layer between both the control layers. CONSTITUTION:A P-type Gatheta.5Altheta.5.As layer is patterned in a stripe state of 15mum of width by normal etching, and a V-shaped groove 28 arriving at a substrate 11 having 3mum of width and 2mum of depth is formed at the center of the stripe by a photolithography method and etching with a sulfuric acid etchant. The groove 28 is formed to form two stripelike grown control layers 27, 27 having 6mum of width. In a semiconductor laser element, a current is effectively injected to an active layer 16 formed above the groove 28. Since a P-N junction for blocking a current is formed of a N-type current blocking layer 12 formed in advance and a P-type clad layer 15, no leakage current is generated. Thus, it can be driven with low current and low power.
公开日期1990-08-29
申请日期1989-02-16
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/76978]  
专题半导体激光器专利数据库
作者单位SHARP CORP
推荐引用方式
GB/T 7714
KANEIWA SHINJI,HAYASHI HIROSHI,MIYAUCHI NOBUYUKI,et al. Semiconductor laser element. JP1990216884A. 1990-08-29.
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