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	Optical coupling device
	SAKATA FUSAKO; OGURA MOTOTSUGU; UNO TOMOAKI; UENOYAMA TAKESHI; NISHII KATSUNORI; KIMURA SOICHI
	1986-08-19
著作权人	MATSUSHITA ELECTRIC IND CO LTD
专利号	JP1986185991A
国家	日本
文献子类	发明申请
其他题名	Optical coupling device
英文摘要	PURPOSE:To enable fixture with high junction efficiency by a method wherein a resin introduced groove, which can flow excessive resin, is formed to a bottom part of a concave section formed on a compound semiconductor substrate. CONSTITUTION:An activator region 3, which is extended to [110] face direction, is formed with regard to [100] face of an InP substrate and a window 7 is made after masking an SiO2 film e.g. on the whole face, then an (a) section of the window 7 becomes a V-groove guide 4 after etching thereof and (b) section becomes a resin introduced groove 5. When H3PO4/HCl system etching is performed for the substrate crystal, the V-groove appears finely on the V- groove guide, then the groove 5 is formed to the groove introduced section due to crystal orientation dependability of etching. In the groove depth, the resin introduced groove 5 side is trimmed to be about several mum deeper than the V groove 4 side. When the optical fiber is fixed on the V-groove guide, optical output, which the optical fiber accepts from laser active region, is almost the same value as that before introducing resin. Thereby, loss before and after fixing of the optical fiber is made zero, therefore high efficient junction can be performed in that respect and it becomes a stable optical coupling device.
公开日期	1986-08-19
申请日期	1985-02-13
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/76283]
专题	半导体激光器专利数据库
作者单位	MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式 GB/T 7714	SAKATA FUSAKO,OGURA MOTOTSUGU,UNO TOMOAKI,et al. Optical coupling device. JP1986185991A. 1986-08-19.

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