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	Manufacture of integrated optical element
	KANAZAWA MAMORU; FUJIMA HARUMI
	1988-07-28
著作权人	TOSHIBA CORP
专利号	JP1988182882A
国家	日本
文献子类	发明申请
其他题名	Manufacture of integrated optical element
英文摘要	PURPOSE:To realize excellent light coupling of a laser and a light waveguide path, by etching a semiconductor surface on which a laser diode is formed and exposing a light emission part vertical to a main surface of a substrate and forming a buffer layer thereon and further forming a three-dimensional waveguide path along a laser light axis. CONSTITUTION:A laser diode active layer 2 made of InGaAsP is formed on an InP substrate 1, and a clad 3 is piled thereon, and then a laser light emission terminal surface 4 is formed by dry etching. The terminal surface 4 is vertical to a main surface of the substrate. Next, a SiO2 film is formed as a buffer layer 5 by a reduced-pressure CVD method in which a forced convection flux is used. In succession a glass film 6 is formed as a light waveguide path layer by a sputtering method, and a three-dimensional waveguide path is obtained by patterning so as to be coupled with a laser diode. Further, a SiO2 film is formed as a protective film 7 thereon, and an electrode 8 for the laser diode is formed to complete the manufacture of an integrated optical element.
公开日期	1988-07-28
申请日期	1987-01-26
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/67433]
专题	半导体激光器专利数据库
作者单位	TOSHIBA CORP
推荐引用方式 GB/T 7714	KANAZAWA MAMORU,FUJIMA HARUMI. Manufacture of integrated optical element. JP1988182882A. 1988-07-28.

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