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	Laser element and manufacture thereof
	MAKUTA AKIO
	1992-01-07
著作权人	株式会社東芝
专利号	JP1992002188A
国家	日本
文献子类	发明申请
其他题名	Laser element and manufacture thereof
英文摘要	PURPOSE:To obtain a laser element which has a variable phase shifting amount, suppresses concentration of a light to a phase shifter and obtain a flat light distribution in a resonator by etching at least part of a waveguide layer formed with a periodic uneven structure to a desired thickness while controlling the shape of the uneven structure. CONSTITUTION:After a GaInAsP active layer 12 and a waveguide layer 13 are sequentially crystalline-grown on an InP substrate 11 a diffraction grating is formed by a two-beam interference exposure method using a laser. Then, only a phase shifting region near the center of a resonator is exposed by using photoresist 18. Thereafter, it is etched to a thickness of obtaining an equivalent refractive index of a desired active layer by using a sulfuric acid etchant. In this case, since the thickness of the layer 13 weakens coupling of a light in a thin region, the uneven part of the grating is reduced by using the etchant having weak etching anisotropy. Subsequently, a clad layer 14, a contact layer 15 are sequentially crystalline-grown, an electrode 16 is deposited, and AR films are further deposited on both end faces to form an element.
公开日期	1992-01-07
申请日期	1990-04-19
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/67091]
专题	半导体激光器专利数据库
作者单位	株式会社東芝
推荐引用方式 GB/T 7714	MAKUTA AKIO. Laser element and manufacture thereof. JP1992002188A. 1992-01-07.

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