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	Monolithically integrated surface emitting laser with modulator
	KOYAMA, FUMIO; HAMED, DALIR
	2016-02-11
著作权人	TOKYO INSTITUTE OF TECHNOLOGY
专利号	US20160043529A1
国家	美国
文献子类	发明申请
其他题名	Monolithically integrated surface emitting laser with modulator
英文摘要	A surface emitting laser includes a structure in which a semiconductor substrate, a lower DBR, and an active layer are layered. A VCSEL (vertical cavity surface emitting laser) and an EAM (electro-absorption modulator) are formed adjacent to each other along a first direction defined on the substrate plane such that they are optically coupled. The EAM outputs an emitted light in a direction that is orthogonal to the substrate. The width of a waveguide region of the VCSEL defined in the second direction is narrower than the width of a waveguide region of the EAM.
公开日期	2016-02-11
申请日期	2015-08-05
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/66293]
专题	半导体激光器专利数据库
作者单位	TOKYO INSTITUTE OF TECHNOLOGY
推荐引用方式 GB/T 7714	KOYAMA, FUMIO,HAMED, DALIR. Monolithically integrated surface emitting laser with modulator. US20160043529A1. 2016-02-11.

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